Infrared microlens arrays based on chalcogenide photoresist, fabricated by thermal reflow process

Journal of Optoelectronics and Advanced Materials

Volumn 2, Issue 2, 2000, Pages 147-152

  Eisenberg, N P ^a   Klebanov, M ^b   Lyubin, V ^b   Manevich, M ^a   Noach, S ^a  

^a JERUSALEM COLLEGE OF TECHNOLOGY   (Israel)

^b BEN GURION UNIVERSITY OF THE NEGEV   (Israel)

Author keywords

Chalcogenide glassy films; Chalcogenide photoresist; Microlens arrays

Indexed keywords

CHALCOGENIDES; FABRICATION; GLASS; MICROLENSES; MICROOPTICS; OPTICAL INSTRUMENT LENSES; PHOTORESISTS;

CHALCOGENIDE GLASSY; CHALCOGENIDE GLASSY FILMS; FILM STRUCTURE; MEASUREMENTS OF; MICRO-LENS ARRAYS; PHOTORESIST MATERIALS; PHOTOSENSITIVE PROPERTIES; THERMAL REFLOW PROCESS;

SELENIUM COMPOUNDS;

EID: 0346856300     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (22)

1. H. Nishihara, T. Suchara, Progress in Optics, Vol. 24, p.1, North-Holland, Amsterdam, (1987).
2. R. H. Bellman, N. F. Borrelli, L. G. Mann, J. M. Quintal, Proc. SPIE, 1544, 209 (1991).
3. Jay T. R., Stern M. B., Knowlden R. E., Proc. SPIE, 1751, 236 (1992).
4. M. W. Farn, M. B. Stern, W. B. Veldkamp, S. S. Medeiros, Optics Letters, 18, 1214 (1993).
5. M. Oikawa, Appl. Opt., 21, 1052 (1982).
6. Z. D. Popovic, R. A. Sprague, G. A. N. Connell, Appl. Opt, 27, 1281 (1988).
7. M. Terao, K. Shigematsu, M. Ojima, Y. Taniguchi, S. Horigome, S. Yonezawa, J. Appl. Phys., 50, 6881 (1979).
8. M. Manevich, N. P. Eisenberg, Proc. SPIE, 2426, 242 (1994).
9. E. J. Gratix, Proc. SPIE, 1992, 266 (1993).
10. N. P. Eisenberg, M. Manevich, M. Klebanov, S. Shtutina, V. Lyubin, Proc. SPIE, 2426, 235 (1995).
11. N. P. Eisenberg, M. Manevich, M. Klebanov, V. Lyubin, S. Shtutina, J. Non-Cryst. Solids, 198-200, 766 (1996).
12. V. Lyubin, M. Klebanov, I. Bar, S. Rosenwaks, N. P. Eisenberg, M. Manevich, J. Vac. Sci. Technol., B15, 823 (1997).
13. S. Noach, M. Manevich, M. Klebanov, V. Lyubin, N. P. Eisenberg, Proc SPIE, 3778, 151 (1999).
14. A. G. Poleshchuk, E. G. Churin, Y. I. Yurlov, B. Mednikarov, J. Imaging Science, 30, 132 (1986).
15. V. M. Lyubin, A. M. Sedikh, N. N. Smirnova, V. P. Shilo, Microelectronics (USSR), 18, 523 (1989).
16. C. W. Slinger, A. Zakery, P. J. S. Ewen, A. E. Owen, Appl. Optics, 31, 2490 (1992).
17. K. Tanaka, J. Non-Cryst. Solids, 35-36, 1023 (1980).
18. K. Shimakava, A. Kolobov, S. R. Elliott, Advances in Physics, 44, 475 (1995).
19. Z. U. Borisova, Glassy semiconductors, Plenum Press, New-York 1981.
20. M. Wobst, J. Non-Cryst. Solids, 11, 255 (1972).
21. B. T. Kolomiets, S. S. Lantratova, V. M. Lyubin, V. P. Shilo, Sov. Phys. Solid State, 21, 594 (1979).
22. A. G. Fischer, C. J. Nuese, J. Electrochem. Soc., 116, 1718 (1969).