Fabrication of nano-gratings in arsenic sulphide films

Journal of Non-Crystalline Solids

Volumn 353, Issue 13-15 SPEC. ISS., 2007, Pages 1427-1430

  Neilson, J R ^a   Kovalskiy, A ^a   Vlcek M ^b   Jain, H ^a   Miller, F ^c  

^a Lehigh University   (United States)

^b UNIVERSITY OF PARDUBICE   (Czech Republic)

^c LEHIGH UNIVERSITY   (United States)

Author keywords

Chalcogenides; Films and coatings; Monte Carlo simulations; Radiation; Scanning electron microscopy; Vapor phase deposition

Indexed keywords

CHALCOGENIDES; DIFFRACTION GRATINGS; ELECTRON BEAMS; ETCHING; MONTE CARLO METHODS; SCANNING ELECTRON MICROSCOPY; VAPOR PHASE EPITAXY;

ARSENIC SULPHIDE; ARSENIC SULPHIDE FILMS; CHALCOGENIDE GLASSES; VAPOR PHASE DEPOSITION;

OPTICAL FILMS;

EID: 34147102174     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2006.10.076     Document Type: Article

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