Novel effects in inorganic As50Se50 photoresists and their application in micro-optics

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 823-827

  Lyubin, V ^a   Klebanov, M ^a   Bar, I ^a   Rosenwaks, S ^a   Eisenberg, N P ^b   Manevich, M ^b  

^a BEN GURION UNIVERSITY OF THE NEGEV   (Israel)

^b JERUSALEM COLLEGE OF TECHNOLOGY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0642323338     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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