A piezoresistive bridge-microcantilever biosensor by CMOS process for surface stress measurement

Sensors and Actuators, B: Chemical

Volumn 145, Issue 1, 2010, Pages 405-410

  Yang, S M ^a   Chang, C ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

CMOS; Piezoresistive microcantilever; Surface stress

Indexed keywords

AFM; BATCH FABRICATION; BIOCHEMICAL REACTIONS; CMOS PROCESSS; DESIGN PARAMETERS; LENGTH RATIO; MEASUREMENT SENSITIVITY; MICRO-CANTILEVERS; MICROCANTILEVER BIOSENSORS; ON-CHIP SIGNALS; PIEZO-RESISTIVE; PIEZORESISTOR; SENSOR PERFORMANCE; STANDARD CMOS; STANDARD CMOS PROCESS; SURFACE STRESS; SURFACE STRESS MEASUREMENT; UNI-AXIAL STRAINS;

ADSORPTION; ATOMIC FORCE MICROSCOPY; BIOSENSORS; BRIDGES; CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; DESIGN; NANOCANTILEVERS; SIGNAL PROCESSING; SURFACE PROPERTIES; TRANSMITTERS;

SURFACE REACTIONS;

EID: 76949084922     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.12.037     Document Type: Article

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