A CMOS-based integrated-system architecture for a static cantilever array

Sensors and Actuators, B: Chemical

Volumn 131, Issue 1, 2008, Pages 254-264

  Zimmermann, M ^a   Volden, T ^a   Kirstein, K U ^a   Hafizovic, S ^a   Lichtenberg, J ^a   Brand, Oliver ^b   Hierlemann, A ^a  

^a ETH ZURICH   (Switzerland)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Cantilever; CMOS; Deformation; Piezoresistor; Static cantilever; Stress; Wheatstone bridge

Indexed keywords

BIOCHEMICAL ENGINEERING; PIEZOELECTRIC TRANSDUCERS; SENSOR ARRAYS; SIGNAL TO NOISE RATIO; STRESS ANALYSIS; SYSTEMS ANALYSIS;

CANTILEVERS; MICROCANTILEVERS; PIEZORESISTORS; POLYMER LAYERS; STATIC CANTILEVERS;

CMOS INTEGRATED CIRCUITS;

EID: 41449097840     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.11.016     Document Type: Article

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