Silicon grating microfabrication for long-range displacement sensor

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 7, Issue 2, 2008, Pages

  Khiat, Ali ^a   Lamarque, Frédéric ^a   Prelle, Christine ^a   Phataralaoha, Anurak ^b   Dittmer, Jan ^b   Krah, Thomas ^b   Leester Schädel, Monika ^b   Büttgenbach, Stephanus ^b  

^a UNIVERSITÉ DE TECHNOLOGIE DE COMPIÈGNE   (France)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

3 D grating; Fiber optic; Long range displacement sensor; Miniaturization; Silicon micromachining

Indexed keywords

COMPOSITE MICROMECHANICS; FIBER OPTICS; MICROMACHINING; OPTIMIZATION; PHOTONICS;

3-D GRATING; DISPLACEMENT SENSOR; ETCHING SOLUTIONS; FABRICATION PROCESS; FIBEROPTIC PROBES; HIGH RESOLUTION; LINEAR DISPLACEMENTS; MEASUREMENT RANGE; MICROMACHINING TECHNIQUES; MINIATURIZATION; MIRROR-LIKE SURFACE; PARAMETER SET; SILICON GRATINGS; SILICON MICROMACHINING;

SENSORS;

EID: 76349103324     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.2909459     Document Type: Article

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