Fabrication and testing of chemically micromachined silicon echelle gratings

Applied Optics

Volumn 39, Issue 7, 2000, Pages 1094-1105

  Keller, Luke D ^a   Jaffe, Daniel T ^b   Ershov, Oleg A ^b   Benedict, Thomas ^c   Graf, Urs U ^d  

^a Department of Obstetrics Gynecology   (United States)

^b The University of Texas at Austin   (United States)

^c Tivoli Systems Inc   (United States)

^d UNIVERSITY OF COLOGNE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MICROMACHINING; PATTERN MATCHING; PHOTOLITHOGRAPHY; SILICON WAFERS; SPECTROGRAPHS;

SILICON ECHELLE GRATINGS;

DIFFRACTION GRATINGS;

EID: 0000016685     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.001094     Document Type: Article

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