Long-range displacement mini-sensor with submicrometric resolution

Proceedings of IEEE Sensors

Volumn , Issue , 2006, Pages 283-286

  Khiat, A ^a   Lamarque, F ^a   Prelle, C ^a   Pouille, Ph ^a   Leester Schadel M ^b   Buttgenbach S ^b  

^a UNIVERSITÉ DE TECHNOLOGIE DE COMPIÈGNE   (France)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DENTISTRY; LAWS AND LEGISLATION; NONMETALS; OPTICAL DESIGN; SILICON;

ANISOTROPIC WET ETCHING; GRATING FABRICATION; HIGH-RESOLUTION SENSORS; INTEGRATED SYSTEMS; OPTICAL PROBING; POSITION SENSORS; RANGE SENSORS; SMALL SIZE;

SENSORS;

EID: 50149121399     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.355775     Document Type: Conference Paper

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