Wet etching of silicon gratings with triangular profiles

Microsystem Technologies

Volumn 11, Issue 12, 2005, Pages 1287-1291

  Fruhauf J ^a   Kronert S ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Sharp edges; Silicon; Triangular gratings; Wet etching

Indexed keywords

ETCHING; MEASUREMENTS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

SHARP EDGES; SILICON GRATINGS; TRIANGULAR GRATINGS; WET ETCHING;

SILICON;

EID: 27644508856     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0612-7     Document Type: Article

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