A silicon integrated opto-electro-mechanical displacement sensor

Sensors and Actuators, A: Physical

Volumn 110, Issue 1-3, 2004, Pages 294-300

  Fourment, S ^a   Arguel, P ^a   Noullet, J L ^a   Lozes, F ^a   Bonnefont, S ^a   Sarrabayrouse, G ^a   Jourlin, Y ^b   Jay, J ^b   Parriaux, O ^b  

^a LAAS CNRS   (France)

^b UNIVERSITÉ JEAN MONNET   (France)

Author keywords

Diffraction gratings; Displacement sensors; OptoASICs

Indexed keywords

CMOS INTEGRATED CIRCUITS; DIFFRACTION; DIFFRACTION GRATINGS; DIGITAL CIRCUITS; ETCHING; HOLOGRAPHY; OPTICAL VARIABLES MEASUREMENT; PHOTODIODES; PHOTOLITHOGRAPHY; REFLECTION; SEMICONDUCTOR LASERS; SILICON;

DISPLACEMENT SENSORS; MICRO-OPTO-ELECTRO-MECHANICAL SYSTEM (MOEMS); OPTICAL METROLOGY SYSTEMS; OPTOASICS; REACTIVE ION ETCHING (RIE);

SENSORS;

EID: 1642484925     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.10.067     Document Type: Conference Paper

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