Integrated micro-displacement sensor that uses beam divergence

Journal of Micromechanics and Microengineering

Volumn 13, Issue 6, 2003, Pages 942-947

  Ito, Takahiro ^a   Sawada, Renshi ^b   Higurashi, Eiji ^b  

^a TOIN UNIVERSITY OF YOKOHAMA   (Japan)

^b NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LASER BEAMS; LIGHT REFLECTION; MIRRORS; OPTICAL WAVEGUIDES; PHOTODIODES; SEMICONDUCTOR LASERS;

OPTICAL ALIGNMENT;

OPTICAL SENSORS;

EID: 0242637009     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/6/317     Document Type: Article

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