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Volumn 338-340, Issue 1 SPEC. ISS., 2004, Pages 793-796
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Novel micro interferometer for length measurements
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Author keywords
[No Author keywords available]
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Indexed keywords
AMORPHOUS SILICON;
LASER BEAMS;
LIGHT INTERFERENCE;
LIGHT PROPAGATION;
OPTICAL VARIABLES MEASUREMENT;
PHOTODETECTORS;
PHOTODIODES;
SILICON ALLOYS;
FRINGE COUNTING;
LENGTH MEASUREMENT;
MICRO INTERFEROMETERS;
OPTICAL STANDING WAVES;
INTERFEROMETERS;
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EID: 2942622228
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2004.03.093 Document Type: Conference Paper |
Times cited : (8)
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References (8)
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