Synthesis of crystalline Si quantum dots by millisecond laser irradiation of SiOxNy layers

Journal of Applied Physics

Volumn 107, Issue 2, 2010, Pages

  Mannino, Giovanni ^a   Spinella, Corrado ^a   Bongiorno, Corrado ^a   Nicotra, Giuseppe ^a   Mercorillo, Flora ^a   Privitera, Vittorio ^a   Franz, Giorgia ^b   Piro, Alberto Maria ^b   Grimaldi, Mariagrazia ^b   Di Stefano, Maria Ausilia ^c   Di Marco, Silvestra ^c  

^a CNR IMM   (Italy)

^b CNR   (Italy)

^c STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITIONAL ANNEALING; CRYSTALLINE SI; FURNACE ANNEALING; IR LASERS; LASER IRRADIATIONS; PHOTOLUMINESCENCE SIGNALS; SI ATOMS; SI QUANTUM DOT; TIME-SCALES;

CRYSTALLINE MATERIALS; IRRADIATION; OPTICAL WAVEGUIDES; QUANTUM DOT LASERS; SILICON; SILICON COMPOUNDS;

SEMICONDUCTOR QUANTUM DOTS;

EID: 75749084088     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3282660     Document Type: Article

References (17)

1. L. Pavesi, L. Dal Negro, C. Mazzoleni, G. Franzo, and F. Priolo, Nature (London) NATUAS 0028-0836 408, 440 (2000). 10.1038/35044012
2. E. C. Cho, S. Park, X. Hao, D. Song, G. Conibeer, S. C. Park, and M. A. Green, Nanotechnology NNOTER 0957-4484 19, 245201 (2008). 10.1088/0957-4484/19/ 24/245201 (Pubitemid 351813664)
3. X. J. Hao, E. C. Cho, G. Scardera, E. Bellet-Amalric, D. Bellet, Y. S. Shen, S. Huang, Y. D. Huang, G. Conibeer, and M. A. Green, Thin Solid Film 517, 5646 (2009). 10.1016/j.tsf.2009.02.076
4. M. C. Beard, K. P. Knutsen, P. Yu, J. M. Luther, Q. Song, W. K. Metzger, R. J. Ellingson, and A. J. Nozik, Nano Lett. NALEFD 1530-6984 7, 2506 (2007). 10.1021/nl071486l (Pubitemid 47310153)
5. A. Luque and A. Marti, Phys. Rev. Lett. PRLTAO 0031-9007 78, 5014 (1997). 10.1103/PhysRevLett.78.5014
6. F. Iacona, C. Bongiorno, C. Spinella, S. Boninelli, and F. Priolo, J. Appl. Phys. JAPIAU 0021-8979 95, 3723 (2004). 10.1063/1.1664026
7. H. Wong, V. Filip, C. K. Wong, and P. S. Chung, Microelectron. Reliab. MCRLAS 0026-2714 47, 1 (2007). 10.1016/j.microrel.2006.01.002 (Pubitemid 44909195)
8. T. Baron, F. Martin, P. Mur, C. Wyon, and M. Dupuy, J. Cryst. Growth JCRGAE 0022-0248 209, 1004 (2000). 10.1016/S0022-0248(99)00742-3 (Pubitemid 30556347)
9. S. Kohli, J. A. Theil, P. C. Dippo, R. K. Ahrenkiel, C. D. Rithner, and P. K. Dorhout, Thin Solid Films THSFAP 0040-6090 473, 89 (2005). 10.1016/j.tsf.2004.07.054
10. M. Ribeiro, I. Pereyra, and M. I. Alayo, Thin Solid Films THSFAP 0040-6090 426, 200 (2003). 10.1016/S0040-6090(03)00008-7
11. K. Matsumoto, K. Imakita, M. Fujii, and S. Hayashi, Jpn. J. Appl. Phys. JJAPA5 0021-4922 44, L1547 (2005). 10.1143/JJAP.44.L1547 (Pubitemid 43184996)
12. S. Spiga, G. Tallarida, A. Borghesi, A. Sassella, and G. De Santi, Thin Solid Film 325, 36 (1998). 10.1016/S0040-6090(98)00423-4
13. G. Nicotra, C. Bongiorno, L. Caristia, S. Coffa, and C. Spinella, Microelectron. Eng. MIENEF 0167-9317 84, 486 (2007). 10.1016/j.mee.2006.10.083 (Pubitemid 46241531)
14. R. G. Barrera and R. Fuchs, Phys. Rev. B PRBMDO 0163-1829 52, 3256 (1995). 10.1103/PhysRevB.52.3256
15. C. Spinella, C. Bongiorno, G. Nicotra, E. Rimini, A. Muscar̀, and S. Coffa, Appl. Phys. Lett. APPLAB 0003-6951 87, 044102 (2005). 10.1063/1.1999839 (Pubitemid 41118003)
16. G. Mannino, A. La Magna, V. Privitera, J. S. Christensen, L. Vines, and B. G. Svensson, J. Electrochem. Soc. JESOAN 0013-4651 155, H603 (2008). 10.1149/1.2939129
17. B. Garrido, J. A. Moreno, M. Lopez, A. Vil̀, J. Samitier, J. R. Morante, and J. Scheid, Thin Solid Films THSFAP 0040-6090 296, 98 (1997). 10.1016/S0040-6090(96)09374-1