SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 325, Issue 1-2, 1998, Pages 36-41

Annealing effects on silicon-rich oxide films studied by spectroscopic ellipsometry

(5) Spiga, S a Tallarida, G a Borghesi, A a,b Sassella, A b De Santi, G c

a LABORATORIO MDM (Italy)

b UNIVERSITY OF MILAN (Italy)

c STMICROELECTRONICS (Italy)

Author keywords

Annealing; Plasma enhanced chemical vapor deposition; Silicon rich oxide films

Indexed keywords

ANNEALING; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; ELLIPSOMETRY; HIGH TEMPERATURE EFFECTS; PLASMA APPLICATIONS; SEMICONDUCTING SILICON COMPOUNDS; SILICA; STOICHIOMETRY;

SILICON RICH OXIDE FILMS;

SEMICONDUCTING FILMS;

EID: 0032117942 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(98)00423-4 Document Type: Article

Times cited : (13)

References (15)

1
- 0026880649
- H.-J. Schliwinski, U. Schnakenberg, W. Windbracke, H. Neff, P. Lange, J. Electrochem. Soc. 139 (1992) 1730.
- (1992) J. Electrochem. Soc. , vol.139 , pp. 1730
- Schliwinski, H.-J.¹ Schnakenberg, U.² Windbracke, W.³ Neff, H.⁴ Lange, P.⁵

2
- 0042671058
- D. Pramanik, Solid State Technol. 9 (1995) 69.
- (1995) Solid State Technol. , vol.9 , pp. 69
- Pramanik, D.¹

3
- 0000408692
- A. Monelli, F. Corni, R. Tonini, C. Ferrari, G. Ottaviani, L. Zanotti, G. Queirolo, J. Appl. Phys. 80 (1996) 109.
- (1996) J. Appl. Phys. , vol.80 , pp. 109
- Monelli, A.¹ Corni, F.² Tonini, R.³ Ferrari, C.⁴ Ottaviani, G.⁵ Zanotti, L.⁶ Queirolo, G.⁷

4
- 0028464205
- F.H.P.M. Habraken, A.E.T. Kuiper, Mat. Sci. Eng. R12 (1994) 123.
- (1994) Mat. Sci. Eng. , vol.R12 , pp. 123
- Habraken, F.H.P.M.¹ Kuiper, A.E.T.²

5
- 0031535906
- A. Sassella, A. Borghesi, F. Corni, A. Monelli, G. Ottaviani, R. Tonini, B. Pivac, M. Bacchetta, L. Zanotti, J. Vac. Sci. Technol. A. 15 (1997) 377.
- (1997) J. Vac. Sci. Technol. A. , vol.15 , pp. 377
- Sassella, A.¹ Borghesi, A.² Corni, F.³ Monelli, A.⁴ Ottaviani, G.⁵ Tonini, R.⁶ Pivac, B.⁷ Bacchetta, M.⁸ Zanotti, L.⁹

6
- 0030395605
- A. Borghesi, A. Sassella, B. Pivac, L. Zanotti, Solid State Commun. 100 (1996) 657.
- (1996) Solid State Commun. , vol.100 , pp. 657
- Borghesi, A.¹ Sassella, A.² Pivac, B.³ Zanotti, L.⁴

7
- 0001315569
- A.J. Kanyon, P.F. Trwoga, C.W. Pitt, G. Rehm, J. Appl. Phys. 79 (1996) 9291.
- (1996) J. Appl. Phys. , vol.79 , pp. 9291
- Kanyon, A.J.¹ Trwoga, P.F.² Pitt, C.W.³ Rehm, G.⁴

8
- 0004040706
- E.D. Palik (Ed.), Academic Press, Orlando, FL
- H.R. Philipp, in E.D. Palik (Ed.), Handbook of Optical Constants of Solids, Academic Press, Orlando, FL, 1985.
- (1985) Handbook of Optical Constants of Solids
- Philipp, H.R.¹

9
- 0003478714
- McGraw Hill, New York
- P.R. Bevington, Data Reduction and Error Analysis for the Physical Sciences, McGraw Hill, New York, 1969.
- (1969) Data Reduction and Error Analysis for the Physical Sciences
- Bevington, P.R.¹

10
- 56249140748
- D.E. Aspnes, J.B. Theeten, J. Electrochem. Soc. 127 (1980) 1359.
- (1980) J. Electrochem. Soc. , vol.127 , pp. 1359
- Aspnes, D.E.¹ Theeten, J.B.²

11
- 0001089370
- A. Sassella, Phys. Rev. B 48 (1993) 14208.
- (1993) Phys. Rev. B , vol.48 , pp. 14208
- Sassella, A.¹

12
- 0020830645
- J.A. Dobrowolski, F.C. Ho, A. Waldorf, Appl. Opt. 22 (1983) 3191.
- (1983) Appl. Opt. , vol.22 , pp. 3191
- Dobrowolski, J.A.¹ Ho, F.C.² Waldorf, A.³

13
- 84973913548
- B. Tatian, Appl. Opt. 23 (1984) 4477.
- (1984) Appl. Opt. , vol.23 , pp. 4477
- Tatian, B.¹

14
- 0021784345
- L.A. Nesbit, Appl. Phys. Lett. 46 (1985) 38.
- (1985) Appl. Phys. Lett. , vol.46 , pp. 38
- Nesbit, L.A.¹

15
- 43949164228
- B. Gruska, K. Wandel, Thin Solid Films 233 (1993) 240.
- (1993) Thin Solid Films , vol.233 , pp. 240
- Gruska, B.¹ Wandel, K.²

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