Deposition and properties of B-N codoped p-type ZnO thin films by RF magnetron sputtering

Applied Surface Science

Volumn 256, Issue 9, 2010, Pages 2726-2730

  Sui, Y R ^a,b   Yao, B ^a,c   Yang, J H ^b   Cui, H F ^a   Huang, X M ^a   Yang, T ^a   Gao, L L ^a   Deng, R ^a   Shen, D Z ^c  

^a JILIN UNIVERSITY   (China)

^b JILIN NORMAL UNIVERSITY   (China)

^c CHANGCHUN INSTITUTE OF OPTICS   (China)

Author keywords

B N codoping; p Type conduction; Properties; Sputtering; Zinc oxide

Indexed keywords

CRYSTAL ORIENTATION; GASES; HETEROJUNCTIONS; II-VI SEMICONDUCTORS; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL FILMS; OXYGEN; PARTIAL PRESSURE; PHOTOLUMINESCENCE SPECTROSCOPY; SEMICONDUCTOR DIODES; SPUTTERING; ZINC OXIDE;

CO-DOPING; NEAR BAND EDGE EMISSIONS; P-TYPE CONDUCTION; PREFERENTIAL ORIENTATION; PROPERTIES; RADIO FREQUENCY MAGNETRON SPUTTERING; RF-MAGNETRON SPUTTERING; TEMPERATURE DEPENDENT PHOTOLUMINESCENCES;

THIN FILMS;

EID: 75249106072     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2009.11.017     Document Type: Article

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