Hardness, hydrophobic and optical properties of fluorine and boron co-alloyed diamond-like carbon films

Materials Letters

Volumn 59, Issue 11, 2005, Pages 1417-1421

  He, Xiao Ming ^a,b   Hakovirta, M ^a   Nastasi, M ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b Avery Research Center   (United States)

Author keywords

Diamond like carbon films; Hydrophobicity; Plasma immersion ion processing

Indexed keywords

BORON; CHEMICAL BONDS; FLUORINE; HYDROPHOBICITY; POLYCARBONATES; PROFILOMETRY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SYNTHESIS (CHEMICAL);

ATOMIC BONDING; HYDROPHOBIC PROPERTIES; PLASMA IMMERSION ION PROCESSING (PIIP); RESONANT ION BACKSCATTERING SPECTROMETRY (RIBS);

DIAMOND LIKE CARBON FILMS;

EID: 14644405009     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2004.11.059     Document Type: Article

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