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Volumn 19, Issue 1, 2010, Pages
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Positronium diffusion in porous methylsilsesquioxane thin films
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Author keywords
Low k; Menger sponge model; Porous methylsisesquioxane thin films; Positronium
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Indexed keywords
DIFFUSION EQUATIONS;
FRACTAL MODEL;
LIFETIME SPECTROSCOPY;
LOW-K;
MEASUREMENT DATA;
MENGER SPONGE MODEL;
NANO-POROUS;
PORE CHARACTERISTICS;
POROUS LOW-K;
POROUS METHYLSILSESQUIOXANE;
POTENTIAL PROBES;
SELF-SIMILARITIES;
STRUCTURAL CHANGE;
DIELECTRIC MATERIALS;
DIFFUSION;
FRACTALS;
POROUS MATERIALS;
POSITRON ANNIHILATION SPECTROSCOPY;
POSITRONS;
PROBES;
RADIATION DAMAGE;
THIN FILMS;
COPPER;
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EID: 74549206057
PISSN: 16741056
EISSN: None
Source Type: Journal
DOI: 10.1088/1674-1056/19/1/013601 Document Type: Article |
Times cited : (8)
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References (36)
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