Nanoporous structure in low-dielectric films with positronium annihilation lifetime spectroscopy

Chinese Physics Letters

Volumn 22, Issue 6, 2005, Pages 1488-1491

  Hu, Yi Fan ^a   Sun, Jia Ning ^b   Gidley, D W ^b  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; POSITRON ANNIHILATION SPECTROSCOPY; POSITRONS; SOLVENTS;

CLOSED PORE; INTERCONNECTED PORES; LIFETIME SPECTROSCOPY; LOW DIELECTRIC; LOW-DIELECTRIC CONSTANT FILM; NANOPOROUS STRUCTURES; ORGANOSILICONES; PORE INTERCONNECTIVITY; PORE-SIZE DISTRIBUTION; SILSEQUIOXANES;

PORE SIZE;

EID: 19844371117     PISSN: 0256307X     EISSN: None     Source Type: Journal    
DOI: 10.1088/0256-307X/22/6/053     Document Type: Article

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