Thermal stability and gap-fill properties of spin-on MSQ low-k dielectrics

Microelectronic Engineering

Volumn 84, Issue 11, 2007, Pages 2606-2609

  Ahner, N ^a   Schulz, S E ^a,b   Blaschta, F ^a   Rennau, M ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b FRAUNHOFER IZM   (Germany)

Author keywords

Annealing; FTIR; Low k dielectrics; Spin coating; Surface energy; Wetting behaviour

Indexed keywords

ASPECT RATIO; FILM THICKNESS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INTERFACIAL ENERGY; LEAKAGE CURRENTS; MEASUREMENT THEORY; MERCURY (METAL); REFRACTIVE INDEX; THERMAL EFFECTS; THERMODYNAMIC STABILITY;

ALUMINIUM COVERED STRUCTURES; GAP FILL PROPERTIES; LOW K DIELECTRICS; SPECTRAL ELLIPSOMETRY; WETTING BEHAVIOUR;

DIELECTRIC MATERIALS;

EID: 34548819020     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.06.007     Document Type: Article

References (4)

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