Effect of coating thickness on the deformation behaviour of diamond-like carbon-silicon system

Thin Solid Films

Volumn 518, Issue 8, 2010, Pages 2021-2028

  Haq, Ayesha J ^a   Munroe, P R ^a   Hoffman, M ^a   Martin, P J ^b   Bendavid, A ^b  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b CSIRO   (Australia)

Author keywords

Deformation; Diamond like carbon; Focused ion beam microscopy; Nanoindentation; Silicon; Transmission electron microscopy

Indexed keywords

COATING THICKNESS; DEFORMATION BEHAVIOUR; DIAMOND-LIKE CARBON; DIAMOND-LIKE CARBON COATINGS; DISLOCATION NUCLEATION; DLC COATINGS; FOCUSED ION BEAM MICROSCOPY; LOAD-DISPLACEMENT CURVE; PHASE TRANSFORMATION; PLASTIC COMPRESSION; SILICON SUBSTRATES; SUBSURFACE MICROSTRUCTURE; THINNER COATINGS; THROUGH-THICKNESS CRACKING;

DEFORMATION; DIAMONDS; FOCUSED ION BEAMS; PHASE INTERFACES; SUBSTRATES; THICKNESS MEASUREMENT; TRANSMISSION ELECTRON MICROSCOPY;

PLASTIC COATINGS;

EID: 73949119150     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.08.041     Document Type: Article

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