The contact response of thin Si-C-coated silicon systems-characterisation by nanoindentation

Surface and Coatings Technology

Volumn 163, Issue 164, 2003, Pages 491-498

  Berasategui, E G ^a   Page, T F ^a  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

Coated systems; Elastic properties; Nano indentation; Scanning electron microscopy; Silicon carbide

Indexed keywords

CRYSTAL ORIENTATION; DEFORMATION; ELASTIC MODULI; INDENTATION; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE;

DEFORMATION STRUCTURES;

COATING TECHNIQUES;

CONTACT; INDENTATION; INORGANIC COATING; SILICON; SILICON CARBIDE;

EID: 0037472723     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00647-3     Document Type: Article

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