Nanoscale three dimensional pattern formation in light emitting porous silicon

Applied Physics Letters

Volumn 92, Issue 19, 2008, Pages

  Chun, Ik Su ^a   Chow, Edmond K ^a   Li, Xiuling ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; LIGHT EMITTING DIODES; PATTERN RECOGNITION; THREE DIMENSIONAL;

CHEMICAL ETCHING; METAL PATTERNS; NANOSCALE PATTERNS;

POROUS SILICON;

EID: 44049083052     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2924311     Document Type: Article

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