Correlation between sputtering conditions and growth properties of (TiAl)N/AlN multilayer coatings

Materials and Manufacturing Processes

Volumn 24, Issue 7-8, 2009, Pages 796-799

  Altuncu, Ekrem ^a   Üstel, Fatih ^b  

^a KOCAELI UNIVERSITY   (Turkey)

^b SAKARYA UNIVERSITY   (Turkey)

Author keywords

Cutting tool coatings; Electron microscopy; Growth morpholgy; Magnetron sputtering PVD; Multilayer thin films; Oxidation behavior; Thermal stability

Indexed keywords

CUTTING TOOL COATING; CUTTING TOOL COATINGS; MULTI-LAYER THIN FILM; OXIDATION BEHAVIORS; THERMAL STABILITY;

COATINGS; CUTTING TOOLS; FILM PREPARATION; MACHINE TOOLS; MAGNETRONS; METAL WORKING TOOLS; MORPHOLOGY; MULTILAYER FILMS; OXIDATION; PHYSICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SURFACE MORPHOLOGY; SURFACE TREATMENT; THERMODYNAMIC STABILITY; TITANIUM COMPOUNDS;

MULTILAYERS;

EID: 73149114884     PISSN: 10426914     EISSN: 15322475     Source Type: Journal    
DOI: 10.1080/10426910902840995     Document Type: Article

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