Deposition of TiAlN coatings using reactive bipolar-pulsed direct current unbalanced magnetron sputtering

Vacuum

Volumn 83, Issue 2, 2008, Pages 427-434

  Barshilia, Harish C ^a   Yogesh, K ^a   Rajam, K S ^a  

^a SURFACE ENGINEERING DIVISION   (India)

Author keywords

HSS drill bits; Performance evaluation; Pulsed sputtering; TiAlN coatings; Unbalanced magnetron sputtering

Indexed keywords

COMPUTER NETWORKS; DC GENERATORS; INORGANIC COATINGS; MAGNETRONS; SILICON; STEEL; STEEL METALLOGRAPHY; STEEL POWDER METALLURGY;

HSS DRILL BITS; PERFORMANCE EVALUATION; PULSED SPUTTERING; TIALN COATINGS; UNBALANCED MAGNETRON SPUTTERING;

MAGNETRON SPUTTERING;

EID: 51249122847     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.04.075     Document Type: Article

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