Effects of Al sputtering power on the structure and growth morphology of (Ti,Al)N/AlN multilayer coatings;Auswirkungen der Al-Sputterleistung auf Gefüge- und Wachstumsmorphologie von (Ti,Al)N/AlN-Multilayer-Beschichtungen

Praktische Metallographie/Practical Metallography

Volumn 42, Issue 3, 2005, Pages 107-115

  Üstel, Fatih ^a  

^a SAKARYA UNIVERSITY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; CUTTING; ION BEAMS; OXIDATION; SPUTTERING; STEEL; VAPOR DEPOSITION;

CUTTING SPEEDS; MULTILAYER COATINGS; REACTIVE MAGNETRON SPUTTERING; SPUTTERING POWER;

ALUMINUM;

EID: 15244363706     PISSN: 0032678X     EISSN: None     Source Type: Journal    
DOI: 10.3139/147.100252     Document Type: Article

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