Microfabrication and chemoresistive characteristics of SBA-15-templated mesoporous carbon gas sensors with CMOS compatibility

Sensors and Actuators, B: Chemical

Volumn 143, Issue 2, 2010, Pages 500-507

  Lu, Chih Cheng ^a   Liao, Kuan Hsun ^a  

^a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY   (Taiwan)

Author keywords

Dielectrophoresis; Gas sensor; MEMS; Mesoporous carbon powders; Microhotplate membrane

Indexed keywords

DIELECTROPHORESIS; GAS SENSOR; GAS SENSORS; MESOPOROUS CARBON; MICRO HOTPLATE; MICROHOTPLATE MEMBRANE;

AMORPHOUS CARBON; CARBON FILMS; CHEMICAL SENSORS; CHROMIUM; COMPOSITE MICROMECHANICS; ELECTRIC FIELDS; ELECTROPHORESIS; EMBEDDED SYSTEMS; GAS DETECTORS; GASES; MEMS; METALLIC COMPOUNDS; MICROELECTROMECHANICAL DEVICES; MOS DEVICES; POWDER METALS; SEMICONDUCTING SILICON; SILICA;

CARBON NANOTUBES;

EID: 73149092520     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.09.035     Document Type: Article

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