Multiwall carbon nanotube gas sensor fabricated using thermomechanical structure

IEEE Electron Device Letters

Volumn 26, Issue 7, 2005, Pages 498-500

  Cho, Woo Sung ^a   Moon, Seung Il ^a   Lee, Yang Doo ^b   Lee, Yun Hi ^b   Park, Jung Ho ^b   Ju, Byeong Kwon ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Korea University   (South Korea)

Author keywords

Gas sensor; Multiwall carbon nanotube (MWCNT); Nitrogen dioxide (NO2); Recovery

Indexed keywords

CARBON NANOTUBES; DESORPTION; ELECTRIC CONTACTS; ELECTRODES; MECHANICAL PROPERTIES; NITROGEN OXIDES; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; THERMAL EFFECTS; THERMAL INSULATING MATERIALS; THERMODYNAMIC PROPERTIES;

CARBON NANOTUBE GAS SENSOR; MICROMACHINED DIAPHRAGM; MULTIWALL CARBON NANOTUBE (MWCNT); THERMOMECHANICAL STRUCTURE;

CHEMICAL SENSORS;

EID: 22944479625     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2005.851095     Document Type: Article

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