Micro hot plate-based sensor array system for the detection of environmentally relevant gases

Analytical Chemistry

Volumn 78, Issue 19, 2006, Pages 6801-6808

  Graf, M ^a,b   Frey, U ^a   Taschini, S ^a   Hierlemann, A ^a  

^a ETH ZURICH   (Switzerland)

^b Sensirion AG   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

MICRO HOT PLATE-BASED SENSOR ARRAY SYSTEM; MOS-TRANSISTOR HEATERS; TEMPERATURE MODULATION TECHNIQUES;

ATMOSPHERIC HUMIDITY; DIGITAL CONTROL SYSTEMS; MICROPROCESSOR CHIPS; MOSFET DEVICES; SEMICONDUCTOR DOPING; THERMAL EFFECTS; THICK FILMS;

CHEMICAL SENSORS;

CARBON MONOXIDE; METAL OXIDE; METHANE; NANOCRYSTAL; PALLADIUM;

ARTICLE; FILM; GAS ANALYSIS; HEATING; HUMIDITY; INTEGRATED CIRCUIT; PHASE TRANSITION; SEMICONDUCTOR; SENSOR; TEMPERATURE;

EID: 33749461610     PISSN: 00032700     EISSN: None     Source Type: Journal    
DOI: 10.1021/ac060467d     Document Type: Article

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