A novel low-temperature method to fabricate MEMS resonators using PMGI as a sacrificial layer

Journal of Micromechanics and Microengineering

Volumn 15, Issue 10, 2005, Pages 1824-1830

  Young, Steven ^a   Weston, Don ^a   Dauksher, Bill ^a   Mancini, David ^a,c   Pacheco, Sergio ^b   Zurcher, Peter ^b   Miller, Mel ^b  

^a MOTOROLA INC   (United States)

^b FREESCALE SEMICONDUCTOR INC   (United States)

^c ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; ELECTRODES; ION BEAMS; MATHEMATICAL MODELS; NATURAL FREQUENCIES; RESONATORS; SCANNING ELECTRON MICROSCOPY;

DEVICE QUALITY FACTOR; LUMPED ELEMENT MODEL; MULTI-STEP ETCH PROCESS; POLYMETHYLGLUTARIMIDE (PMGI);

MICROELECTROMECHANICAL DEVICES;

EID: 24644484792     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/10/006     Document Type: Article

References (6)

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2. Lund J L, Jahnes C V, Deligianni H, Buchwalter L P, Cotte J M, Andricacos P, Seeger D E and Magerlein J H 2002 A low temperature bi-CMOS compatible process for MEMS RF resonators and filters Solid-State Sensor Actuator and Microsystems Workshop (Hilton Head Island, SC) pp 38-41
3. Wang K, Yu Y, Wong A-C and Nguyen C T-C 1999 VHF free-free beam high-Q michromechanical resonators Technical Digest 12th Int. IEEE Micro Electro Mechanical Systems Conf. pp 453-9
4. MicroChem PMGI Data sheets and Frequently Asked Questions Reference Guidelines http://www.microchem.com/products/pmgi.htm
5. Barker N S 1999 Distributed MEMS transmission lines PhD Thesis University of Michigan
6. Ono T et al 2000 Micro-discharge and electric breakdown in a micro-gap J. Micromech. Microeng. 10 445-51