Approaches to analyzing insulators with Auger electron spectroscopy: Update and overview

Journal of Electron Spectroscopy and Related Phenomena

Volumn 176, Issue 1-3, 2010, Pages 80-94

  Baer, D R ^a   Lea, A S ^a   Geller, J D ^b   Hammond, J S ^c   Kover, L ^d   Powell, C J ^e   Seah, M P ^f   Suzuki, M ^g   Watts, J F ^h   Wolstenholme, J ⁱ  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

^b Geller MicroAnalytical Laboratory   (United States)

^c Physical Electronics Inc Minnesota   (United States)

^d INSTITUTE OF NUCLEAR RESEARCH ATOMKI   (Hungary)

^e NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^f NATIONAL PHYSICAL LABORATORY   (United Kingdom)

^g ULVAC PHI Inc   (Japan)

^h UNIVERSITY OF SURREY   (United Kingdom)

ⁱ Thermo Fisher Scientific   (United States)

Author keywords

Auger electron spectroscopy; Practical guide; Surface analysis; Surface charging

Indexed keywords

ELECTRICAL CHARGES; HIGH SPATIAL RESOLUTION; HIGH-RESOLUTION MEASUREMENTS; LOW ENERGIES; NEAR-SURFACE; PRACTICAL GUIDE; SAMPLE PREPARATION; SUMMARY TABLES; SURFACE CHARGING;

AUGERS; ELECTRONS; ION SOURCES; IONS; SPECTRUM ANALYSIS; SURFACE ANALYSIS; SURFACE CHARGE;

AUGER ELECTRON SPECTROSCOPY;

EID: 71849090739     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elspec.2009.03.021     Document Type: Article

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