AES and SAM microanalysis of structure ceramics by thinning and coating the backside

Surface and Interface Analysis

Volumn 31, Issue 4, 2001, Pages 338-342

  Yu, Ling ^a,b   Jin, Deling ^a  

^a SHANGHAI INSTITUTE OF CERAMICS   (China)

^b NONE   (China)

Author keywords

AES; Coating; Microanalysis; SAM; Structure ceramics; Thinning

Indexed keywords

ALUMINA; ATOMS; CHEMICAL BONDS; COATINGS; COMPOSITE MATERIALS; DOPING (ADDITIVES); ELECTRON BEAMS; INTERFACES (MATERIALS); NITROGEN; OXYGEN; SILICON CARBIDE; SILICON NITRIDE;

SCANNING AUGER MICROSCOPY (SAM);

CERAMIC MATERIALS;

EID: 0035306010     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.982     Document Type: Article

References (9)

1. Harris DW, Nowicki RS. In Practical Surface Analysis (2nd edn), vol. 1, Briggs D, Seah MP (eds). John Wiley: Chichester, 1994; 265-276.
2. Hamminger R. Surf. Interface Anal. 1988; 12: 519.
3. Taylor DM. J. Phys. D: Appl. Phys. 1978; 11: 190.
4. Cazaux J. J. Electron. Spectrosc. Relat. Phenom. 1999; 105: 155.
5. Katsumi U. J. Electron Microsc. 1998; 47: 143.
6. Goldstein JI, Newbury DE (eds). Scanning Electron Microscopy and X-Ray Microanalysis. Plenum Press: New York, 1981; 146-255.
7. Electron Microscopy and Analysis (2nd edn), Goodhew PJ, Humphreys FJ (eds). Taylor & Francis: London, 1988; 99-103.
8. Briggs D, Seah MP (eds). Practical Surface Analysis (2nd edn). John Wiley: Chichester, 1994; Appendix 5, p. 602.
9. Peng XF, Zhang YF, Huang XX. J. Inorg. Mater. 1998; 13: 469.