Analysis of electrically non-conducting sample structures with electron and mass spectroscopic methods

Thin Solid Films

Volumn 341, Issue 1, 1999, Pages 105-108

  Oechsner, H ^a  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; ELECTRON BEAMS; ELECTRON GAS; MASS SPECTROMETRY; SURFACE STRUCTURE;

SECONDARY NEUTRAL MASS SPECTROMETRY; SURFACE ANALYSIS;

DIELECTRIC MATERIALS;

EID: 0032688993     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01545-4     Document Type: Article

References (11)

1. Seiler H. J. Appl. Phys. 54:1983;11.
2. Ooka K., Dunn B., Mackenzie J.D. J. Non-Cryst. Sol. 12:1973;1.
3. H. Oechsner, Proc. 5th SURTEC, Hanser Verlag, München, 1989, p. 485.
4. Rothhaar U., Oechsner H. Fres. J. Anal. Chem. 353:1995;533.
5. Jede R., Ganschow O., Kaiser U. Briggs D., Seah M.P. Practical Surface Analysis, 1975 (2nd Ed.), Vol. 2, Ion and Neutral Spectroscopy. 1992;425 Wiley, Chichester.
6. Oechsner H. Plasma Phys. 16:1974;835.
7. Stumpe E., Oechsner H., Schoof H. Appl. Phys. 20:1979;55.
8. Oechsner H. Nucl. Instrum. Methods Phys. Res. B. 33:1988;918.
9. Bieck W., Gnaser H., Oechsner H. J. Vac. Sci. Technol. A. 12:1994;2537.
10. Oechsner H. Appl. Surf. Sci. 70:1993;250.
11. Bock W., Kopnarski M., Oechsner H. Fres. J. Anal. Chem. 353:1995;510.