Comparison of silicon potentials for cluster bombardment simulations

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 255, Issue 1 SPEC. ISS., 2007, Pages 253-258

  Samela, J ^a   Nordlund, K ^a   Keinonen, J ^a   Popok, V N ^b  

^a UNIVERSITY OF HELSINKI   (Finland)

^b UNIVERSITY OF GOTHENBURG   (Sweden)

Author keywords

Atomic cluster; Collision cascade; Cratering; Interatomic potential; Ion irradiation; Molecular dynamics; Sputtering

Indexed keywords

COMPUTER SIMULATION; ION BOMBARDMENT; KINETIC ENERGY; MOLECULAR DYNAMICS; SPUTTERING;

ATOMIC CLUSTER; COLLISION CASCADE; INTERATOMIC POTENTIAL; ION IRRADIATION;

SILICON;

EID: 33846920062     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.11.080     Document Type: Article

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