A high numerical aperture, polymer-based, planar microlens array

Optics Express

Volumn 17, Issue 22, 2009, Pages 19908-19918

  Tripathi, Anurag ^a   Chokshi, Trushal Vijaykumar ^a   Chronis, Nikos ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURING; FILLED POLYMERS; POLYMERS;

EFFECTIVE FOCAL LENGTHS; ELASTOMERIC MEMBRANES; HIGH NUMERICAL APERTURES; LIGHT COLLECTION EFFICIENCY; OPTICAL APPLICATIONS; OPTO-MECHANICAL SIMULATIONS; PLANAR MICROLENS ARRAYS; TRANSVERSE RESOLUTION;

MICROLENSES;

ELASTOMER; POLYMER;

ARTICLE; CHEMISTRY; COMPUTER AIDED DESIGN; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; OPTICAL INSTRUMENTATION; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; YOUNG MODULUS;

COMPUTER-AIDED DESIGN; ELASTIC MODULUS; ELASTOMERS; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LENSES; MINIATURIZATION; POLYMERS; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY;

EID: 70749152733     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.019908     Document Type: Article

References (31)

1. F. B. McCormick, F. A. P. Tooley, T. J. Cloonan, J. M. Sasian, H. S. Hinton, K. O. Mersereau, and A. Y. Feldbluin, "Optical interconnections using microlens arrays," Opt. Quantum Electron. 24(4), S465-S477 (1992).
2. H. Hamam, "A two-way optical, interconnection network using a single mode fiber array," Opt. Commun. 150(1-6), 270-276 (1998).
3. Y.-P. Huang, H.-P. D. Shieh, and S.-T. Wu, "Applications of Multidirectional Asymmetrical Microlens-Array Light-Control Films on Reflective Liquid-Crystal Displays for linage Quality Enhancement," Appl. Opt. 43(18), 3656-3663 (2004).
4. H. Peng, Y. L. Ho, X.-J. Yu, M., Wong, and H.-S. Kwok, "Coupling Efficiency Enhancement in Organic Light-Emitting Devices Using Microlens Array-Theory and Experiment," J. Display Technol. 1(2), 278-282 (2005).
5. K. Cai-Jun, Y. Xin-Jian, L. Jian-Jun, and C. Si-Hai, "Fabrication, Testing and Integration Technologies of Polymer Microlens for Pt/Si Schottky-Barrier Infrared Charge Coupled Device Applications," Chin. Phys. Lett. 22(1), 135-138 (2005).
6. B. Javidi, S.-H. Hong, and O. Matoba, "Multidimensional optical sensor and imaging system," Appl. Opt. 45(13), 2986-2994 (2006).
7. M.-H. Wu, K. E. Paul, J. Yang, and G. M. Whitesides, "Fabrication of frequency-selective surfaces using microlens projection photolithography," Appl. Phys. Lett. 80(19), 3500-3502 (2002).
8. K. F. Chan, Z. Feng, R. Yang, A. Ishikawa, and W. Mei, "High-resolution maskless lithography," J. Microlitho. Microfab. Microsyst. 2(4), 331-339 (2003).
9. M. Eisner, N. Lindlein, and J. Schwider, "Confocal microscopy with a refractive microlens-pinhole array," Opt. Lett. 23(10), 748-749 (1998).
10. J. C. Roulet, R. Volkel, H. P. Herzig, E. Verpoorte, N. F. de Rooij, and R. Dandliker, "Fabrication of multilayer systems combining microfluidic and microoptical elements for fluorescence detection," J. Microelectromech. Syst. 10(4), 482-491 (2001).
11. K. Aljasem, D. Mader, A. Werber, H. Zappe, and S. Reichelt, "Pneumatically-actuated tunable microlens for endoscopic optical coherence tomography Transducers 2007 - 2007 International Solid-State Sensors Actuators and Microsystems Conference," (2007), pp. 2557-2560.
12. M. H. Wu, and G. M. Whitesides, "Fabrication of two-dimensional arrays of microlenses and their applications in photolithography," J. Microinech. Microeng. 12(6), 747-758 (2002).
13. D. A. Fletcher, K. B. Crozier, K. W. Guarini, S. C. Minne, G. S. Kino, C. F. Quate, and K. E. Goodson, "Microfabricated silicon solid immersion lens," Microelectroinechanical. Systems, Journalism 10, 450-459 (2001).
14. S. Biehl, R. Danzebrink, P. Oliveira, and M. A. Aegerter, "Refractive Microlens Fabrication by Ihk-Jet Process," J. Sol-Gel Sci. Technol. 13(1/3), 177-182 (1998).
15. N. S. Ong, Y. H. Koh, and Y. Q. Fu, "Microlens array produced using hot embossing process," Microelectron. Eng. 60(3-4), 365-379 (2002).
16. S.-d Moon, S. Kang, and J.-U. Bu, "Fabrication of polymeric microlens of hemispherical shape using microinolding," Opt. Eng. 41(9), 2267-2270 (2002).
17. J. Albero, L. Nieradko, C. Gorecki, H. Ottevaere, V. Gomez, H. Thienpont, J. Pietarinen, B. Päivänranta, and N. Passilly, "Fabrication of spherical, microlenses by a combination of isotropic wet etching of silicon and molding techniques," Opt. Express 17(8), 6283-6292 (2009).
18. P. Nussbaum, I. Philipoussis, A. Husser, and H. P. Herzig, "Simple technique for replication of micro-optical elements," Opt. Eng. 37(6), 1804-1808 (1998).
19. M. V. Kunnavakkain, F. M. Houlihan, M. Schlax, J. A. Liddle, P. Kolodner, O. Nalamasu, and J. A. Rogers, "Low-cost, low-loss microlens arrays fabricated by soft-lithography replication process," Appl. Phys. Lett. 82(8), 1152-1154 (2003).
20. X. C. Yuan, W. X. Yu, M. He, J. Bu, W. C. Cheong, H. B. Niu, and X. Peng, "Soft-lithography-enabled fabrication of large numerical aperture refractive microlens array in hybrid SiO[sub 2]-TiO[sub 2] sol-gel glass," Appl. Phys. Lett. 86(11), 114102-114103 (2005).
21. S. Kopetz, D. Cai, E. Rabe, and A. Neyer, "PDMS-based optical waveguide layer for integration in electricaloptical circuit boards," AEU, Int. J. Electron. Commun. 61(3), 163-167 (2007).
22. F. Schneider, T. Fellner, J. Wilde, and U. Walirabe, "Mechanical properties of silicones for MEMS," J. Micromech. Microeng. 18(6), 065008 (2008).
23. K. L. Mills, X. Y. Zhu, S. C. Takayama, and M. D. Thouless, "The mechanical properties of a surface-modified layer on poly(dimethylsiloxane), " J. Mater. Res. 23(1), 37-48 (2008).
24. X. Yu, Z. Wang, and Y. Han, "Microlenses fabricated by discontinuous dewetting and soft lithography," Microelectron. Eng. 85(9), 1878-1881 (2008).
25. N. Chronis, G. Liu, K.-H. Jeong, and L. Lee, "Tunable liquid-filled microlens array integrated with microfluidic network," Opt. Express 11(19), 2370-2378 (2003).
26. X. Cheng, A. Gupta, C. Chen, R. G. Tompkins, W. Rodriguez, and M. Toner, "Enhancing the performance of a point-of-care CD4+ T-cell counting microchip through monocyte depletion for HIV/AIDS diagnostics," Lab Chip 9(10), 1357-1364 (2009).
27. D. S. Reichmuth, S. K. Wang, L. M. Barrett, D. J. Throckmorton, W. Einfeld, and A. K. Singh, "Rapid microchip-based electrophoretic immunoassays for the detection of swine influenza virus," Lab Chip 8(8), 1319-1324 (2008).
28. E. Wilder, M. Fasolka, S. Guo, C. Stafford, and S. Lin-Gibson, "Measuring the modulus of soft polymer networks via a buckling-based metrology," Macromolecules 39(12), 4138-4143 (2006).
29. M. Oikawa, H. Nemoto, K. Hamanaka, and E. Okuda, "High numerical aperture planar microlens with swelled structure," Appl. Opt. 29(28), 4077-4080 (1990).
30. S. Inoue, and K. R. Spring, Video Microscopy The Fundamentals (Plenum Publishing Corporation, New York, 1997).
31. J. R. Polimeni, D. Granquist-Fraser, R. J. Wood, and E. L. Schwartz, "Physical limits to spatial resolution of optical recording: clarifying the spatial structure of cortical hypercolumns," Proc. Natl. Acad. Sci. U.S.A. 102(11), 4158-4163 (2005).