Soft-lithography-enabled fabrication of large numerical aperture refractive microlens array in hybrid SiO 2-TiO 2 sol-gel glass

Applied Physics Letters

Volumn 86, Issue 11, 2005, Pages 1-3

  Yuan, X C ^a,b   Yu, W X ^a   He, M ^a   Bu, J ^a   Cheong, W C ^a   Niu, H B ^b   Peng, X ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b SHENZHEN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

POLY-DIMETHYLSILOXANE (PDMS); REFRACTIVE MICROLENS ARRAYS; SOFT-LITHOGRAPHY-ENABLED FABRICATION; SOL-GEL GLASS;

ELASTOMERS; MICROLENSES; MICROOPTICS; PHOTOLITHOGRAPHY; PHOTORESISTS; PHOTOSENSITIVE GLASS; SILICA; TITANIUM DIOXIDE;

SOL-GELS;

EID: 17944369189     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1882751     Document Type: Article

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