Fabrication of spherical microlenses by a combination of isotropic wet etching of silicon and molding techniques

Optics Express

Volumn 17, Issue 8, 2009, Pages 6283-6292

  Albero, Jorge ^a   Nieradko, Lukasz ^a   Gorecki, Christophe ^a   Ottevaere, Heidi ^b   Gomez, Virginia ^b   Thienpont, Hugo ^b   Pietarinen, Juha ^c   Päivänranta, Birgit ^c   Passilly, Nicolas ^c  

^a FEMTO ST INSTITUTE   (France)

^b VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

^c UNIVERSITY OF EASTERN FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; MICROLENSES; MOLDING; MOLDS; OPTICAL PROPERTIES;

ETCHANT CONCENTRATIONS; ISOTROPIC WET ETCHING; MEASUREMENTS OF; MOLD FABRICATION; MOLDING TECHNIQUES; PROCESS PARAMETERS; PROCESS TECHNOLOGIES; REPLICATION TECHNIQUES;

WET ETCHING;

SILICON;

ANISOTROPY; ARTICLE; CHEMISTRY; COMPUTER AIDED DESIGN; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; OPTICAL INSTRUMENTATION; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; WETTABILITY;

ANISOTROPY; COMPUTER-AIDED DESIGN; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LENSES; MINIATURIZATION; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SILICON; WETTABILITY;

EID: 65149097749     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.006283     Document Type: Article

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