Microlenses fabricated by discontinuous dewetting and soft lithography

Microelectronic Engineering

Volumn 85, Issue 9, 2008, Pages 1878-1881

  Yu, Xinhong ^a   Wang, Zhe ^a   Han, Yanchun ^a  

^a CHANGCHUN INSTITUTE OF APPLIED CHEMISTRY   (China)

Author keywords

Microlens; Soft lithography

Indexed keywords

LITHOGRAPHY; MICROOPTICS; MODULATION; OPTICAL DESIGN;

DE-WETTING; ICE TRANSITION; LOW COSTS; MICRO-LENS ARRAYS; MICROLENS; SOFT LITHOGRAPHY;

MICROLENSES;

EID: 49749143347     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.06.001     Document Type: Article

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