Crystallinity of titania thin films deposited by light induced chemical vapor deposition

Applied Surface Science

Volumn 168, Issue 1-4, 2000, Pages 61-65

  Halary, E ^a   Haro Poniatowski, E ^b   Benvenuti, G ^a   Hoffmann, P ^a  

^a EPFL   (Switzerland)

^b UNIVERSIDAD AUTÓNOMA METROPOLITANA   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; AMORPHOUS MATERIALS; CHEMICAL VAPOR DEPOSITION; EXCIMER LASERS; PHOTOCHEMICAL REACTIONS; RAMAN SPECTROSCOPY; THIN FILMS; X RAY DIFFRACTION;

CRYSTALLINITY; LIGHT INDUCED CHEMICAL VAPOR DEPOSITION;

TITANIUM DIOXIDE;

EID: 0034511467     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00849-7     Document Type: Article

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