Adaptive tip-withdrawal control for reliable microfabrication by localized electrodeposition

Journal of Microelectromechanical Systems

Volumn 13, Issue 5, 2004, Pages 822-832

  Said, Ra'a A ^a  

^a UNITED ARAB EMIRATES UNIVERSITY   (United Arab Emirates)

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE CONTROL SYSTEMS; ELECTRODEPOSITION; MICROELECTRODES; MICROSTRUCTURE; NANOTECHNOLOGY; OPTIMIZATION; SCANNING ELECTRON MICROSCOPY;

COPPER DEPOSITION; ELECTROCHEMICAL DEPOSITION; LOCALIZED DEPOSITION; PROGRESSIVE BOUNDARY UPDATE METHOD; SHAPE EVOLUTION; SHAPE FORMATION;

MICROELECTROMECHANICAL DEVICES;

EID: 7044241828     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.835774     Document Type: Article

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