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Volumn 14, Issue 5, 2003, Pages 523-531
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Microfabrication by localized electrochemical deposition: Experimental investigation and theoretical modelling
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Author keywords
[No Author keywords available]
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Indexed keywords
ASPECT RATIO;
BOUNDARY ELEMENT METHOD;
COMPUTER SIMULATION;
CURRENT DENSITY;
ELECTRIC FIELDS;
FABRICATION;
IONS;
MICROELECTRODES;
NANOTECHNOLOGY;
SUBSTRATES;
TRANSPORT PROPERTIES;
MICROFABRICATION;
ELECTRODEPOSITION;
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EID: 0038104796
PISSN: 09574484
EISSN: None
Source Type: Journal
DOI: 10.1088/0957-4484/14/5/308 Document Type: Article |
Times cited : (70)
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References (43)
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