High accuracy laser diffractometer: Angle-scale traceability by the error separation method with a grating

Measurement Science and Technology

Volumn 20, Issue 8, 2009, Pages

  Korpelainen, V ^a   Iho, A ^a   Seppa J ^a   Lassila, A ^a  

^a CENTRE FOR METROLOGY AND ACCREDITATION MIKES   (Finland)

Author keywords

Angle encoder calibration; Grating; Nanometrology; Optical diffractometer; Pitch calibration

Indexed keywords

CALIBRATION; DIFFRACTION; DIFFRACTOMETERS; ERRORS; LIGHT SOURCES; NEODYMIUM LASERS; UNCERTAINTY ANALYSIS;

DISTRIBUTED SEQUENCES; GRATING; LASER DIFFRACTOMETERS; LITTROW CONFIGURATION; NANOMETROLOGY; OPTICAL DIFFRACTOMETERS; STANDARD UNCERTAINTY; UNCERTAINTY ESTIMATES;

DIFFRACTION GRATINGS;

EID: 70350689668     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/20/8/084020     Document Type: Article

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