Imaging laser diffractometer for traceable grating pitch calibration

Measurement Science and Technology

Volumn 18, Issue 2, 2007, Pages 375-383

  Pekelsky, J R ^a   Eves, B J ^a   Nistico, P R ^a   Decker, J E ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Grating pitch; Laser diffractometer

Indexed keywords

CALIBRATION; CHARGE COUPLED DEVICES; COMPUTATION THEORY; DIFFRACTOMETERS; ERROR ANALYSIS; OPTICAL BEAM SPLITTERS;

DIFFRACTION PATTERN; GRATING PITCH; LASER DIFFRACTOMETER;

DIFFRACTION GRATINGS;

CALIBRATION; CHARGE COUPLED DEVICES; COMPUTATION THEORY; DIFFRACTION GRATINGS; DIFFRACTOMETERS; ERROR ANALYSIS; OPTICAL BEAM SPLITTERS;

EID: 34247278302     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/2/S08     Document Type: Conference Paper

References (13)

1. McClelland J J, Anderson W R, Bradley C C, Walkiewicz M and Celotta R J 2003 Accuracy of nanoscale pitch standards fabricated by laser-focused atomic deposition J. Res. Natl. Inst. Stand. Technol. 108 99-113
2. Misumi I et al 2003 Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope Meas. Sci. Technol. 14 2065-74
3. Koenders L, Dziomba T, Thomsen-Schmidt P and Wilkening G 2005 Standards for the calibration of instruments for dimensional nanometrology Nanoscale Calibration Standards and Methods ed G Wilkening and L Koenders (Weinheim: Wiley-VCH) pp 245-58
4. Koenders L and Meli F 2005 Height and pitch at the nanoscale-How traceable is nanometrology? Nanoscale Calibration Standards and Methods ed G Wilkening and L Koenders (Weinheim: Wiley-VCH) pp 205-19
5. Dai G, Koenders L, Pohlenz F, Dziomba T and Danzebrink H 2005 Accurate and traceable calibration of one-dimensional gratings Meas. Sci. Technol. 16 1241-9
6. Herrmann K, Mirande W, Hasche K and Pohlenz F 2001 Investigation of gratings with period lengths in the nanometre range PTB Report vol F44 pp 78-85
7. Meli F, Thalmann R and Blattner P 1999 High precision pitch calibration of gratings using laser diffractometry Proc. 1st Int. Conf. on Precision Engineering and Nanotechnology (Bremen) vol 2 ed P McKeown et al pp 252-5
8. Korotkov V I, Pulkin S A, Vitushkin A L and Vitushkin L F 1996 Laser interferometric diffractometry for measurements of diffraction grating spacing Appl. Opt. 35 4782-6
9. Pisani M and Picotto G B 1998 Characterisation of optical and UV gratings by means of scanning tunnelling microscopy and optical diffractometry PTB Report vol F34 pp 7-11
10. Yoon T H, Eom C I, Chung M S and Kong H J 1999 Diffractometric methods for absolute measurement of diffraction-grating spacings Opt. Lett. 24 107-9
11. Nunn J 2000 Calibration of 2 dimensional magnification standards for SPMs and SEMs through optical diffraction: method, traceability and uncertainties PTB Report vol F39 pp 17-24
12. Chen C-J, Pan S-P, Chang L-C and Peng G-S 2003 Pitch calibration by reflective laser diffraction Proc. SPIE 5190 156-64
13. Song W Y, Jung K Y, O B-H and Park B C 2004 Precision laser diffractometry for grating period measurements J. Kor. Phys. Soc. 45 1510-6