Developments on the NMI-VSL traceable Scanning Probe Microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5190, Issue , 2003, Pages 173-177

  Dirscherl, K ^a   Koops, K R ^a  

^a NMi Van Swinden Laboratorium   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CONTROL SYSTEMS; ELECTRIC POTENTIAL; HYSTERESIS; INTERFEROMETERS; LASERS; LIGHT POLARIZATION; MICROSCOPES; OPTICAL RESOLVING POWER; PERSONAL COMPUTERS; VOLUME MEASUREMENT;

3D TRANSLATION STAGE; ATOMIC FORCE MICROSCOPE (AFM); HETERODYNE LASER; SCANNING PROBE MICROSCOPE;

SCANNING;

EID: 2342635859     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.503082     Document Type: Conference Paper

References (5)

1. P-517.3 NanoPositioner, Physik Instrumente (PI), Karlsruhe, Germany
2. ZMI 2000 3D interferometric system, Zygo Corporation, USA
3. S.Cosijns, "Polarization errors in Zygo optic" (dutch), internal report NMi-VSL
4. K.Dirscherl, "Online correction of scanning probe microscopes with pixel accuracy", Ph.D. thesis, Technical university of Denmark, Lyngby, (2000)
5. B.D. Coleman, M.L. Hodgdon, "A constitutive relation for rate-independent hysteresis in ferromagnetically soft materials", Int. J. Engng. Sci. 24,6, p. 897-919, (1986)