Pitch Calibration by Reflective Laser Diffraction

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5190, Issue , 2003, Pages 156-164

  Chen, Chao Jung ^a   Pan, Shen Peng ^a   Chang, Liang Chih ^a   Peng, Gwo Sheng ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Laser Diffraction; Littrow Configuration; Pitch Calibration

Indexed keywords

ATOMIC FORCE MICROSCOPY; DIFFRACTOMETERS; ELECTROMAGNETIC WAVE REFLECTION; ERROR ANALYSIS; LASERS; MIRRORS; OPTICAL RESOLVING POWER; OPTICAL SENSORS; THERMAL EXPANSION; ULTRAVIOLET RADIATION; X RAYS;

CAPACITANCE SENSOR; LASER DIFFRACTION; LITTROW CONFIGURATION; PITCH CALIBRATION;

ELECTROMAGNETIC WAVE DIFFRACTION;

EID: 2342530408     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.505559     Document Type: Conference Paper

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