Design and operation of a silicon ring resonator for force sensing applications above 1 MHz

Journal of Micromechanics and Microengineering

Volumn 19, Issue 11, 2009, Pages

  Walter, B ^a   Faucher, M ^a   Algre E ^a   Legrand, B ^a   Boisgard, R ^b   Aime J P ^b   Buchaillot, L ^a  

^a INSTITUT D ELECTRONIQUE   (France)

^b UMR 5798   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE PROBE; BULK-MODE; CAPACITIVE DETECTION; DESIGN AND OPERATIONS; ELECTROSTATIC ACTUATION; FABRICATED DEVICE; FORCE SENSING; HIGH FREQUENCY; HYDRODYNAMIC FORCES; LIQUID MEDIUM; MECHANICAL INTERACTIONS; MEMS RESONATORS; OPTICAL AND ELECTRICAL CHARACTERIZATION; PROBE-BASED; SILICON RING; SILICON RING RESONATOR; VIBRATION MODES; WATER DROPLETS;

ELECTROSTATIC ACTUATORS; FLUID DYNAMICS; MICROELECTROMECHANICAL DEVICES; PROBES;

RESONATORS;

EID: 70350645369     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/19/11/115009     Document Type: Article

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