Proposition of atomic force probes based on silicon ring-resonators

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1529-1532

  Faucher, Marc ^a   Walter, Benjamin ^a   Rollier, Anne Sophie ^a   Seguini, Karim ^a   Legrand, Bernard ^a   Couturier, Gérard ^b   Aimé, Jean Pierre ^b   Bernard, Charlotte ^b   Boisgard, Rodolphe ^b   Buchaillot, Lionel ^a  

^a INSTITUT D ELECTRONIQUE   (France)

^b UNIVERSITÉ DE BORDEAUX   (France)

Author keywords

Atomic force microscopy; Force sensing; Resonators

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; MICROSYSTEMS; PROBES; RESONATORS; SILICON;

ATOMIC FORCE PROBE; CIRCULAR PLATES; DISSIPATION EFFECTS; FORCE SENSING; LATERAL MODES; PROOF OF CONCEPT; SILICON RESONATORS; SILICON RING RESONATOR;

SOLID-STATE SENSORS;

EID: 50049134888     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300436     Document Type: Conference Paper

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