Planarization of Bit-Patterned Surface Using Gas Cluster Ion Beams

IEEE Transactions on Magnetics

Volumn 45, Issue 10, 2009, Pages 3503-3506

  Toyoda, N ^a   Hirota, T ^a   Nagato, K ^b   Tani, H ^c   Sakane, Y ^d   Hamaguchi, T ^b   Nakao, M ^b   Yamada, I ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

^c KANSAI UNIVERSITY   (Japan)

^d WESTERN DIGITAL CORPORATION   (United States)

Author keywords

Gas cluster ion beam (GCIB); Hard disks; Ion beam applications; Smoothing methods

Indexed keywords

CARBON; ELECTRON BEAM LITHOGRAPHY; HARD DISK STORAGE; ION BEAM ASSISTED DEPOSITION; IONS; IRRADIATION; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

ACCELERATION VOLTAGES; BIT-PATTERNED MEDIA; GAS CLUSTER ION BEAMS; INDUCTIVE COUPLED PLASMA; ION-BEAM APPLICATIONS; LOW ENERGY IRRADIATION; SMOOTHING METHODS; TRANSMISSION ELECTRON;

ION BEAMS;

EID: 70350608289     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2009.2023064     Document Type: Article

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