Secondary ion mass spectrometry with gas cluster ion beams

Applied Surface Science

Volumn 203-204, Issue , 2003, Pages 214-218

  Toyoda, Noriaki ^a   Matsuo, Jiro ^b   Aoki, Takaaki ^b   Yamada, Isao ^a   Fenner, David B ^c  

^a UNIVERSITY OF HYOGO   (Japan)

^b KYOTO UNIVERSITY   (Japan)

^c Epion Corporation   (United States)

Author keywords

Cluster ion; Ion mixing; Molecular dynamics; SIMS

Indexed keywords

COMPUTER SIMULATION; GASES; ION BEAMS; IONS; MOLECULAR DYNAMICS; SPUTTERING; SUBSTRATES;

ENERGY DENSITY;

SECONDARY ION MASS SPECTROMETRY;

EID: 12244291210     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00628-1     Document Type: Conference Paper

References (8)

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