Optical thin film formation by oxygen cluster ion beam assisted depositions

Applied Surface Science

Volumn 226, Issue 1-3 SPEC. ISS., 2004, Pages 231-236

  Toyoda, N ^a   Yamada, I ^a  

^a UNIVERSITY OF HYOGO   (Japan)

Author keywords

Cluster ion beam; Ion assist deposition; Surface smoothing

Indexed keywords

ATOMIC FORCE MICROSCOPY; EXPLOSIVES; HELIUM; ION BEAM ASSISTED DEPOSITION; OXYGEN; POROSITY; QUARTZ; SCANNING ELECTRON MICROSCOPY; SILICA; SURFACE ROUGHNESS; X RAY DIFFRACTION;

CLUSTER ION BEAM; ION ASSIST DEPOSITION; SURFACE SMOOTHING;

OPTICAL FILMS;

EID: 1642350870     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2003.11.025     Document Type: Conference Paper

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