Study of gas cluster ion beam planarization for discrete track magnetic disks

IEEE Transactions on Magnetics

Volumn 44, Issue 11 PART 2, 2008, Pages 3476-3479

  Nagato, Keisuke ^a,b   Tani, Hiroshi ^c   Sakane, Yasuo ^d   Toyoda, Noriaki ^e   Yamada, Isao ^e   Nakao, Masayuki ^a   Hamaguchi, Tetsuya ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b JAPAN SOCIETY FOR THE PROMOTION OF SCIENCE   (Japan)

^c SAN JOSE RESEARCH CENTER   (United States)

^d WESTERN DIGITAL CORPORATION   (United States)

^e UNIVERSITY OF HYOGO   (Japan)

Author keywords

Carbon overcoat; Discrete track magnetic disks; Gas cluster ion beam; Planarization

Indexed keywords

CARBON; ETCHING; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; IONS; MAGNETISM; NONVOLATILE STORAGE;

CARBON OVERCOAT; DISCRETE TRACK MEDIA; GAS CLUSTER ION BEAMS; LATERAL SPUTTERING; LOW DOSE; MAGNETIC DISK; MAGNETIC LAYERS; PLANARIZATION;

ION BEAMS;

EID: 65249087211     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMAG.2008.2001618     Document Type: Article

References (8)

1. B. D. Terris and T. Thomson, "Nanofabricated and self-assembled magnetic structures as data storage media", J. Phys. D: Appl. Phys., vol. 38, pp. r199-r222, 2005.
2. K. Hattori, K. Ito, Y. Soeno, M. Takai, and M. Matsuzaki, "Fabrication of discrete track perpendicular media for high recording density", IEEE Trans. Magn., vol. 40, no. 4, pp. 2510-2515, Jul. 2004.
3. Y. Soeno, M. Moriya, K. Ito, K. Hattori, A. Kaizu, T. Aoyama, M. Matsuzaki, and H. Sakai, "Feasibility of discrete track perpendicular media for high track density recording", IEEE Trans. Magn., vol. 39, no. 4, pp. 1967-1971, Jul. 2003.
4. D. Wachenschwanz, W. Jiang, E. Roddick, A. Homola, P. Dorsey, B. Harper, D. Treves, and C. Bajorek, "Design of a manufacturable discrete track recording medium", IEEE Trans. Magn., vol. 41, no. 2, pp. 670-675, Feb. 2005. (Pubitemid 40296508)
5. X. Che, Y. Tang, H. J. Lee, S. Zhang, K. S. Moon, N. Y. Kim, S. Y. Hong, N. Takahashi, M. T. Moneck, and J. G. Zhu, "Recording performance study of pmr media with patterned tracks", IEEE Trans. Magn., vol. 43, no. 6, pp. 2292-2294, Jun. 2007.
6. M. T. Moneck, J. G. Zhu, X. Che, Y. Tang, H. J. Lee, S. Zhang, K. S. Moon, and N. Takahashi, "Fabrication of flyable perpendicular discrete track media", IEEE Trans. Magn., vol. 43, no. 6, pp. 2127-2129, Jun. 2007.
7. I. Yamada, J. Matsuo, N. Toyoda, and A. Kirkpatrick, "Materials processing by gas cluster ion beams", Mater. Sci. Eng. R, vol. 34, pp. 231-295, 2001.
8. S. Kakuta, S. Sasaki, T. Hirano, K. Ueda, T. Seki, S. Ninomiya, M. Hada, and J. Matsuo, "Low damage smoothing of magnetic material films using a gas cluster ion beam", Nucl. Instrum. Methods B, vol. 257, pp. 677-682, 2007. (Pubitemid 46498292)